LENS ARRAY, LED ILLUMINATION UNIT, EXPOSURE DEVICE, AND EXPOSURE METHOD

• Main Authors: MATSUSHITA TOMOTSUNE, YAMAGUCHI YOICHI, MATSUZAKA MASAAKI
• Format: Patent
• Language: English; Japanese
• Published: 10.08.2021
• Subjects: APPARATUS SPECIALLY ADAPTED THEREFOR; BASIC ELECTRIC ELEMENTS; BLASTING; CINEMATOGRAPHY; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; ELECTROGRAPHY; FUNCTIONAL FEATURES OR DETAILS OF LIGHTING DEVICES OR SYSTEMSTHEREOF; HEATING; HOLOGRAPHY; LIGHTING; MATERIALS THEREFOR; MECHANICAL ENGINEERING; NON-PORTABLE LIGHTING DEVICES; OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS; OPTICS; ORIGINALS THEREFOR; PHOTOGRAPHY; PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES; PHYSICS; SEMICONDUCTOR DEVICES; STRUCTURAL COMBINATIONS OF LIGHTING DEVICES WITH OTHERARTICLES, NOT OTHERWISE PROVIDED FOR; SYSTEMS THEREOF; VEHICLE LIGHTING DEVICES SPECIALLY ADAPTED FOR VEHICLEEXTERIORS; WEAPONS

To provide a lens array which can be stably assembled to an LED base plate, has excellent illuminance distribution, and can be downsized, an LED illumination unit, an exposure device, and an exposure method.SOLUTION: A lens array 50 includes a lens plate 51 and a plurality of lenses 52. The lens plate 51 has a lens region to which the lens 52 is fixed and a non-lens region to which the lens 52 is not fixed. In addition, a base plate 24 to which an LED 25 is fixed has an LED region to which the LED 25 is fixed and a non-LED region to which the LED 25 is not fixed. The lens plate 51 and the base plate 24 are tightened together such that the lens region and the LED region, and the non-lens region and the non-LED region, are respectively superposed on each other.SELECTED DRAWING: Figure 3 【課題】レンズアレイをＬＥＤのベースプレートに安定して組み付けることができ、照度分布に優れ、かつ小型化できるレンズアレイ、ＬＥＤ照明ユニット、露光装置、及び露光方法を提供する。【解決手段】レンズアレイ５０は、レンズプレート５１と、複数のレンズ５２と、を備える。レンズプレート５１には、レンズ５２が固定されるレンズ領域と、レンズ５２が固定されない非レンズ領域とを有する。また、ＬＥＤ２５が固定されるベースプレート２４には、ＬＥＤ２５が固定されるＬＥＤ領域と、ＬＥＤ２５が固定されない非ＬＥＤ領域とを有する。レンズプレート５１とベースプレート２４は、レンズ領域とＬＥＤ領域、及び非レンズ領域と非ＬＥＤ領域が重ね合わされて締結される。【選択図】図３