POROUS ALUMINA SHEET AND METHOD FOR MANUFACTURING THE SAME

• Main Authors: SHINGU SUSUMU, OYAGI MITSUNARI
• Format: Patent
• Language: English; Japanese
• Published: 05.08.2021
• Subjects: APPARATUS THEREFOR; CHEMISTRY; ELECTROFORMING; ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; METALLURGY; PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTIONOF COATINGS

To provide a porous alumina sheet in which a crack is less likely to occur even when an external force is applied to a micro region on a surface of the porous alumina sheet as compared with conventional porous alumina sheets, and a method for manufacturing the porous alumina sheet.SOLUTION: A porous alumina sheet 1 comprises a first surface 1A, and a second surface 1B located on the opposite side of the first surface. A plurality of through holes 1D penetrating from the first surface to the second surface are formed in the porous alumina sheet. Each of the plurality of through holes has a circular cylindrical shape. A hole diameter of each of the plurality of through holes is less than or equal to 0.5 μm. A bulk density of the porous alumina sheet is greater than or equal to 1.0 g/cm3. In a rectangular visual field in which a length of one side is 80 μm, an average surface roughness Sa of each of the first surface and the second surface is less than or equal to 15 nm, and an average surface roughness SzJIS of each of the first surface and the second surface is less than or equal to 150 nm.SELECTED DRAWING: Figure 1 【課題】従来のポーラスアルミナシートと比べて、ポーラスアルミナシートの表面の微小領域に外力が加えられたときにもクラックが生じにくいポーラスアルミナシートおよびその製造方法を提供する。【解決手段】ポーラスアルミナシート１は、第１面１Ａと、第１面とは反対側に位置する第２面１Ｂとを有する。ポーラスアルミナシートには、第１面から第２面に貫通する複数の貫通孔１Ｄが形成されている。複数の貫通孔の各々は円柱形状を有しており、複数の貫通孔の各々の孔径は、０．５μｍ以下である。ポーラスアルミナシートの嵩密度は１．０ｇ／ｃｍ3以上である。一辺の長さが８０μｍである矩形視野内において、第１面および第２面の各々の平均面粗さＳａが１５ｎｍ以下であり、かつ第１面および第２面の各々の平均面粗さＳｚＪＩＳが１５０ｎｍ以下である。【選択図】図１