MIRROR DRIVING MECHANISM

To provide a mirror driving mechanism that can prevent a deterioration in image quality of an image to be drawn.SOLUTION: A mirror driving mechanism 11a comprises: a mirror part 14 that is arranged in a through-hole 13; a plate-like support part 31a that oscillatably supports a mirror part 15; and d...

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Bibliographic Details
Main Author MATSUZAKI JUNPEI
Format Patent
LanguageEnglish
Japanese
Published 29.07.2021
Subjects
MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICALDEVICES
MICROSTRUCTURAL TECHNOLOGY
OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
OPTICS
PERFORMING OPERATIONS
PHYSICS
TRANSPORTING
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