MIRROR DRIVING MECHANISM

• Main Author: MATSUZAKI JUNPEI
• Format: Patent
• Language: English; Japanese
• Published: 29.07.2021
• Subjects: MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICALDEVICES; MICROSTRUCTURAL TECHNOLOGY; OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS; OPTICS; PERFORMING OPERATIONS; PHYSICS; TRANSPORTING

To provide a mirror driving mechanism that can prevent a deterioration in image quality of an image to be drawn.SOLUTION: A mirror driving mechanism 11a comprises: a mirror part 14 that is arranged in a through-hole 13; a plate-like support part 31a that oscillatably supports a mirror part 15; and dynamic vibration absorbing materials 51a, 51b that are connected with an outer edge 23 of the mirror part 14 and have a characteristic frequency matching the characteristic frequency of an oscillation part 25 that includes the mirror part 14 and the support part 31a and performs an oscillatory movement. The support part 31a includes a plurality of first portions 32a to 32h and second portions 33a to 33f that extend in a direction orthogonal to a central axis 24a of oscillation of the support part 31a and are arranged in parallel with each other, and piezoelectric elements 36a to 36h that extend along the longitudinal direction of the plurality of first portions 32a to 32h and are arranged on a plane located on one side in a thickness direction in areas corresponding to the first portions 32a to 32h.SELECTED DRAWING: Figure 1 【課題】描画される画像の画質の劣化を抑制することができるミラー駆動機構を提供する。【解決手段】ミラー駆動機構１１ａは、貫通孔１３内に配置されるミラー部１４と、ミラー部１５を揺動可能に支持する板状の支持部３１ａと、ミラー部１４の外縁２３に接続されており、ミラー部１４と支持部３１ａとを含み揺動運動を行う揺動部２５の固有振動数に一致する固有振動数を有する動吸振材５１ａ，５１ｂと、を備える。支持部３１ａは、支持部３１ａの揺動の中心軸２４ａに直交する方向にそれぞれ延び、互いに平行に配置される複数の第１部分３２ａ〜３２ｈと、第２部分３３ａ〜３３ｆと、複数の第１部分３２ａ〜３２ｈのそれぞれの長手方向に沿って延び、第１部分３２ａ〜３２ｈに対応する領域における、厚み方向の一方側に位置する面上に配置される圧電素子３６ａ〜３６ｈと、を含む。【選択図】図１