EXHAUST GAS INTRODUCTION PIPE OF SCRUBBER AND SCRUBBER

• Main Authors: KINDAICHI RIMPEI, ISHIBASHI NAOTO, BANDO AKIRA, KODAMA TOMOHIRO
• Format: Patent
• Language: English; Japanese
• Published: 01.07.2021
• Subjects: BASIC ELECTRIC ELEMENTS; CHEMICAL SURFACE TREATMENT; CHEMISTRY; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING MATERIAL WITH METALLIC MATERIAL; COATING METALLIC MATERIAL; DIFFUSION TREATMENT OF METALLIC MATERIAL; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL; METALLURGY; PERFORMING OPERATIONS; PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL; SEMICONDUCTOR DEVICES; SEPARATION; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; TRANSPORTING

To provide an exhaust gas introduction pipe of a scrubber which can inhibit generation of by-products.SOLUTION: An exhaust gas introduction pipe of a scrubber can remove a first gas which flows from a reactor, which enables vapor growth of an SiC thin film therein, through an exhaust pipe to be exha...