ELECTROSTATIC CHUCK AND SUBSTRATE RETAINER

• Main Author: KUSAMA YASUHIKO
• Format: Patent
• Language: English; Japanese
• Published: 17.06.2021
• Subjects: BASIC ELECTRIC ELEMENTS; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER; ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; GENERATION; SEMICONDUCTOR DEVICES

To provide an electrostatic chuck and a substrate retainer, capable of suppressing occurrence of discharge around a gas hole.SOLUTION: An electrostatic chuck 30 has a gas hole 311 for supplying gas to a rear surface of a suction object. Around the gas hole, a positive electrode 32P and a negative electrode 32N are arranged so as to face each other and be spaced by a first gap 321. The first gap is divided at the gas hole into a first route 322 on the positive electrode side and a second route 323 on the negative electrode side. The first route and the second route extend along the outer periphery of the gas hole so as to interpose the gas hole therebetween and join to make a single second gap 324. At a location at which the first gap is divided into the first route and the second route and a location at which the first route and the second route join, corners formed by the positive electrode and the negative electrode are roundish. In a plan view, a first distance a between the gas hole and the positive electrode is constant in the first route's portion excluding roundish parts and a second distance b between the gas hole and the negative electrode is constant in the second route's portion excluding roundish parts, where the first distance is equal to the second distance.SELECTED DRAWING: Figure 2 【課題】ガス孔周辺での放電の発生を抑制可能な静電チャック及び基板固定装置を提供する。【解決手段】静電チャック３０であって、吸着対象物の裏面にガスを供給するガス孔３１１の周辺において、正極３２Ｐと負極３２Ｎは、第１の隙間３２１を空けて対向配置され、第１の隙間はガス孔で正極側の第１の経路３２２と負極側の第２の経路３２３に分かれ、第１の経路と第２の経路はガス孔を挟んでガス孔の外周に沿って延伸し、合流して１つの第２の隙間３２４となり、第１の隙間が第１の経路と第２の経路に分かれる箇所及び第１の経路と第２の経路が合流する箇所において、正極及び負極が形成する角部は丸みを帯びている。平面視で、丸みを帯びた部分を除く第１の経路においてガス孔と正極との第１の距離ａは一定であり、丸みを帯びた部分を除く第２の経路においてガス孔と負極との第２の距離ｂは一定であり、第１の距離と第２の距離が等しい。【選択図】図２