SAMPLE FOR OBSERVATION OF TRANSMISSION ELECTRON MICROSCOPE AND PREPARING METHOD THEREFOR

To provide a method for suppressing deformation of a sliced sample during FIB processing while making a thinner and sliced sample, and the sliced sample suppressed in deformation during ion beam processing.SOLUTION: Provided is a sample for observation of transmission electron microscope which inclu...

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Bibliographic Details
Main Author OKADA JIRO
Format Patent
LanguageEnglish
Japanese
Published 10.06.2021
Subjects
BASIC ELECTRIC ELEMENTS
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
ELECTRICITY
INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES
MEASURING
PHYSICS
TESTING
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Summary:To provide a method for suppressing deformation of a sliced sample during FIB processing while making a thinner and sliced sample, and the sliced sample suppressed in deformation during ion beam processing.SOLUTION: Provided is a sample for observation of transmission electron microscope which includes: a sliced sample surface as an object to be observed; a columnar structure at both ends of the sample surface; and, further, bridge-like structure connecting both columnar structures.SELECTED DRAWING: Figure 1 【課題】より薄く薄片化された試料を作製しながらも、ＦＩＢ加工中における当該薄片化された試料の変形を抑止する手法、および、イオンビーム加工中における変形が抑止された薄片化された試料を提供する。【解決手段】透過電子顕微鏡観察用試料であって、被観察対象である薄片化された試料面を有し、前記試料面の両端部には柱状構造を有し、さらに、前記両柱状構造を繋ぐ橋状構造を有することを特徴とする透過電子顕微鏡観察用試料を提供する。【選択図】図１
Bibliography:Application Number: JP20200185022