FLUID SUPPLY UNIT

• Main Authors: SATOMI YUKI, AIKAWA KENJI, TSUJINO KENGO, INADA TOSHIYUKI
• Format: Patent
• Language: English; Japanese
• Published: 03.06.2021
• Subjects: ACTUATING-FLOATS; BLASTING; COCKS; DEVICES FOR VENTING OR AERATING; ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVEFUNCTIONING OF MACHINES OR INSTALLATIONS; HEATING; JOINTS OR FITTINGS FOR PIPES; LIGHTING; MEANS FOR THERMAL INSULATION IN GENERAL; MECHANICAL ENGINEERING; PIPES; SUPPORTS FOR PIPES, CABLES OR PROTECTIVE TUBING; TAPS; THERMAL INSULATION IN GENERAL; VALVES; WEAPONS

To provide a fluid supply unit capable of reducing the number of fluid introducing portions.SOLUTION: A fluid supply unit 100 is equipped with a plurality of fluid supply lines 1 extended in a first direction and aligned in a second direction orthogonal to the first direction, and a joint member 2 that is provided over one end portions of the plurality of adjacent fluid supply lines 1 and branching a flow of process gas or purge gas supplied from the fluid supply source to the plurality of fluid supply lines 1. The joint member 2 has a single fluid inflow channel 21 connected to the fluid supply source, three fluid branching outflow channel 22 respectively connected to the three fluid supply lines 1, and a single communication channel 23 formed between the fluid inflow channel 21 and the three fluid branching outflow channel 22, and communicating between the fluid inflow channel 21 and the three fluid branching outflow channel 22.SELECTED DRAWING: Figure 1 【課題】流体導入部の数を削減することができる流体供給ユニットを提供する。【解決手段】流体供給ユニット１００は、第１方向に沿って延在するとともに第１方向と直交する第２方向に沿って配列される複数の流体供給ライン１と、隣接する複数の流体供給ライン１の一端に跨って設けられ、流体供給源から供給されるプロセスガス又はパージガスの流れを複数の流体供給ライン１に分岐させる継手部材２と、を備える。継手部材２は、流体供給源に接続される単一の流体流入流路２１と、三つの流体供給ライン１のそれぞれに接続される三つの流体分岐流出流路２２と、流体流入流路２１と三つの流体分岐流出流路２２との間に形成されて流体流入流路２１と三つの流体分岐流出流路２２とを連通する単一の連通流路２３と、を有する。【選択図】図１