MANUFACTURING METHOD OF PIEZOELECTRIC ACTUATOR

• Main Authors: AIMONO TAKANORI, FURUIKE HARUNOBU, SHIMIZU TOSHIHIRO, TAKABE HONKI, ITAYAMA YASUHIRO, SUMI KOJI, NAKAYAMA MASAO
• Format: Patent
• Language: English; Japanese
• Published: 03.06.2021
• Subjects: CORRECTION OF TYPOGRAPHICAL ERRORS; ELECTRICITY; i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; LINING MACHINES; PERFORMING OPERATIONS; PRINTING; SELECTIVE PRINTING MECHANISMS; STAMPS; TRANSPORTING; TYPEWRITERS

To provide a manufacturing method of a piezoelectric actuator which hardly strips off a metal oxide layer.SOLUTION: A manufacturing method of a piezoelectric actuator includes a process of forming a diaphragm, a process of forming a first electrode on the diaphragm, a process of forming a piezoelectric layer on the first electrode and a process of forming a second electrode on the piezoelectric layer. Therein, the process of forming the diaphragm has a single layer forming process which includes a process of forming a metal layer containing zirconium by a vapor phase method and a process of calcining the metal layer to form a metal oxide layer, the single layer forming process is repeated and the diaphragm on which the metal oxide layer is laminated is formed and, therein, the thickness of the metal oxide layer is less than 200 nm.SELECTED DRAWING: Figure 10 【課題】金属酸化物層が剥がれ難い圧電アクチュエーターの製造方法を提供する。【解決手段】振動板を形成する工程と、前記振動板上に第１電極を形成する工程と、前記第１電極上に圧電体層を形成する工程と、前記圧電体層上に第２電極を形成する工程と、を含み、前記振動板を形成する工程は、気相法によってジルコニウムを含む金属層を形成する工程と、前記金属層を焼成して金属酸化物層を形成する工程と、を含む単一層形成工程を有し、前記単一層形成工程を繰り返し、前記金属酸化物層が積層された前記振動板を形成し、前記金属酸化物層の厚さは、２００ｎｍ未満である、圧電アクチュエーターの製造方法。【選択図】図１０