SEAL DEVICE, VACUUM DEVICE, FILM FORMING DEVICE, AND MULTI-LAYER FILM MANUFACTURING METHOD

• Main Author: MURAKAMI KYOJI
• Format: Patent
• Language: English; Japanese
• Published: 27.05.2021
• Subjects: BLASTING; CHEMICAL SURFACE TREATMENT; CHEMISTRY; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING MATERIAL WITH METALLIC MATERIAL; COATING METALLIC MATERIAL; CYLINDERS; DIFFUSION TREATMENT OF METALLIC MATERIAL; ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVEFUNCTIONING OF MACHINES OR INSTALLATIONS; HEATING; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL; LIGHTING; MECHANICAL ENGINEERING; METALLURGY; PISTONS; SEALINGS; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; THERMAL INSULATION IN GENERAL; WEAPONS

To provide a seal device which can form a large differential pressure at relatively low cost.SOLUTION: A seal device 1 according to one embodiment of the present invention allows the web W to be continuously transferred while keeping a distance between a first space and a second space having lower pressure than the first space. The seal device 1 includes: a frame body 10 provided to a partitioning wall P for partitioning between the first space and the second space, communicating with the first space and the second space, and the transfer opening 11 through which the web W passes; a sealing roller 20 arranged inside the transfer opening 11 and for guiding the web W; and a shutter part 30 for sealing a gap between the frame body 10 and the sealing roller 20. The shutter part 30 includes a seal member 31 having a tip end edge facing a peripheral face of the sealing roller 20 and curved in a projected or recessed manner on a side of the sealing roller 20 according to a warpage of the sealing roller 20 in a regular operation.SELECTED DRAWING: Figure 2 【課題】比較的安価に大きな差圧を形成できるシール装置を提供すること。【解決手段】本発明の一態様に係るシール装置１は、第１空間と前記第１空間よりも圧力が低い第２空間とを隔離しつつウェブＷを連続搬送可能とするシール装置１であって、前記第１空間と前記第２空間との間を区分する隔壁Ｐに配設され、前記第１空間及び前記第２空間に連通し、前記ウェブＷが通過する搬送開口１１を有する枠体１０と、前記搬送開口１１の内部に配設され、前記ウェブＷを案内する封止ローラ２０と、前記枠体１０と前記封止ローラ２０との隙間を封止するシャッタ部３０と、を備え、前記シャッタ部３０は、前記封止ローラ２０の周面に対向するとともに定常運転時における前記封止ローラ２０の撓みに合わせて前記封止ローラ２０の側に凸状又は凹状に湾曲している先端縁を有するシール部材３１を含む。【選択図】図２