VACUUM PUMP AND METHOD OF MANUFACTURING THE SAME
To facilitate the production of a Holweck groove.SOLUTION: A vacuum pump includes a Holweck pump stage 14, and the Holweck pump stage has a Holweck stator and a Holweck rotor that rotates about a rotor axis 12 during operation of the vacuum pump. The Holweck rotor interacts with the Holweck stator t...
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Main Authors | , , |
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Format | Patent |
Language | English Japanese |
Published |
27.05.2021
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Subjects | |
Online Access | Get full text |
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Summary: | To facilitate the production of a Holweck groove.SOLUTION: A vacuum pump includes a Holweck pump stage 14, and the Holweck pump stage has a Holweck stator and a Holweck rotor that rotates about a rotor axis 12 during operation of the vacuum pump. The Holweck rotor interacts with the Holweck stator to produce pumping action, the Holweck pump stage has at least one threaded Holweck groove 16 and the Holweck groove is defined by at least one side wall 18. The side wall is a cross section on which the rotor axis is located, and is formed at least partially oblique to the rotor axis.SELECTED DRAWING: Figure 6
【課題】ホルベック溝の製作を容易にする。【解決手段】真空ポンプにおいて、ホルベックポンプ段14を備え、ホルベックポンプ段は、ホルベックステータと、真空ポンプの運転時にロータ軸線12を中心に回転するホルベックロータとを有し、ホルベックロータは、ホルベックステータと相互作用してポンプ作用を生じさせ、ホルベックポンプ段は、ねじ山状の少なくとも1つのホルベック溝16を有し、ホルベック溝は、少なくとも1つの側壁18によって画定されていて、側壁は、ロータ軸線が位置する断面で、ロータ軸線に対して少なくとも部分的に斜めに形成されている。【選択図】図6 |
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Bibliography: | Application Number: JP20200159322 |