SEALING DEVICE, VACUUM DEVICE, FILM DEPOSITION APPARATUS AND MULTILAYER FILM MANUFACTURING METHOD

• Main Author: MURAKAMI KYOJI
• Format: Patent
• Language: English; Japanese
• Published: 27.05.2021
• Subjects: CHEMICAL SURFACE TREATMENT; CHEMISTRY; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING MATERIAL WITH METALLIC MATERIAL; COATING METALLIC MATERIAL; DIFFUSION TREATMENT OF METALLIC MATERIAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL; METALLURGY; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION

To provide a sealing device capable of comparatively inexpensively forming a large differential pressure.SOLUTION: The sealing device according to one aspect of the present invention capable of continuously conveying a web while separating a first space from a second space having a pressure lower than that of the first space comprises: a frame arranged in a partition for separating the first space from the second space and having a conveyance opening passing the web; and a sealing roller arranged in the inside of the conveyance opening and guiding the web. The inner wall surface of the conveyance opening includes a pair of circumferential sealing surfaces facing the peripheral surface of the sealing roller at a fixed interval and a pair of end sealing surfaces facing the end surface of the sealing roller, and the frame includes: an exhaust passage opened to the circumferential sealing surface and connected to a low pressure source; and a suction groove continuously formed from the circumferential sealing surface to the end sealing surface and communicating with the exhaust passage.SELECTED DRAWING: Figure 2 【課題】比較的安価に大きな差圧を形成できるシール装置を提供すること。【解決手段】本発明の一態様に係るシール装置は、第１空間と前記第１空間よりも圧力が低い第２空間とを隔離しつつウェブを連続搬送可能とするシール装置であって、前記第１空間と前記第２空間との間を区分する隔壁に配設され、前記ウェブが通過する搬送開口を有する枠体と、前記搬送開口の内部に配設され、前記ウェブを案内する封止ローラと、を備え、前記搬送開口の内壁面は、前記封止ローラの周面に一定の間隔を空けて対向する一対の周封止面と、前記封止ローラの端面に対向する一対の端封止面と、を有し、前記枠体は、前記周封止面に開口し、低圧源に接続される排気流路と、前記周封止面から前記端封止面に連続して形成され、前記排気流路と連通する吸引溝と、を有する。【選択図】図２