SUPPORTING GLASS SUBSTRATE AND LAMINATED BODY

• Main Authors: TAMAI KIYOSHI, KASHIMA IZURU, ONO KAZUTAKA, KOBAYASHI YUSUKE, YAMAMOTO HIROSHI, INABA SEIJI
• Format: Patent
• Language: English; Japanese
• Published: 27.05.2021
• Subjects: BASIC ELECTRIC ELEMENTS; CHEMICAL COMPOSITION OF GLASSES, GLAZES, OR VITREOUSENAMELS; CHEMISTRY; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; GLASS; JOINING GLASS TO GLASS OR OTHER MATERIALS; METALLURGY; MINERAL OR SLAG WOOL; SEMICONDUCTOR DEVICES; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS,MINERALS OR SLAGS; SURFACE TREATMENT OF GLASS

To provide a supporting glass substrate that is prevented from breaking and, even when breaking, is prevented from splitting into many pieces.SOLUTION: A supporting glass substrate 10 includes a compression stress layer 12 on a surface thereof, and has an average thermal expansion coefficient of 7 ppm/°C to 15 ppm/°C at 50°C to 200°C, an internal tensile stress of 5 MPa to 55 MPa, and a depth of the compression stress layer that is 10 μm to 60 μm.SELECTED DRAWING: Figure 1 【課題】破損の発生及び割れた時の多数の破片の発生を低減した、支持ガラス基板の提供。【解決手段】支持ガラス基板１０は、表面に圧縮応力層１２を含み、５０℃〜２００℃における平均熱膨張係数が７ｐｐｍ／℃〜１５ｐｐｍ／℃であり、内部引張応力が５ＭＰａ〜５５ＭＰａであり、圧縮応力層の深さが１０μｍ〜６０μｍである。【選択図】図１