LASER PROCESSING HEAD AND LASER PROCESSING DEVICE

To provide a laser processing head that functions as a detection part of a capacitive sensor for measuring a gap between itself and a workpiece, and that can have a more accurate charge amount accumulated in itself depending upon size of the gap to the workpiece, according to the present invention.S...

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Bibliographic Details
Main Author TSUKAMOTO YOSHIAKI
Format Patent
LanguageEnglish
Japanese
Published 15.04.2021
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Summary:To provide a laser processing head that functions as a detection part of a capacitive sensor for measuring a gap between itself and a workpiece, and that can have a more accurate charge amount accumulated in itself depending upon size of the gap to the workpiece, according to the present invention.SOLUTION: A laser processing head 24 according to the present invention comprises: a cylinder body 100 which functions as a detection part of a capacitive sensor 70 irradiating a workpiece OP with laser light, made incident from one end, from the other end, and constituting a capacitor with the workpiece OP to measure a gap G between itself and the workpiece PO; and a guard electrode 110 (as one example of a shield member) which has a first part 111 surrounding an outer periphery of the cylinder body 100 and a second part 116 which is arranged at one-end side of the cylinder body 100 for the cylinder body 100, and overlaps with at least a partial range of an end surface 104A on the one-end side of the cylinder body 100 when viewed from an axial direction of the cylinder body 100.SELECTED DRAWING: Figure 2B 【課題】本発明は、自身と加工対象物とのギャップを測定するための静電容量センサの検出部として機能するレーザー加工ヘッドにおいて、加工対象物とのギャップの大きさに起因して自身に溜まる電荷量をより正確にできるレーザー加工ヘッドの提供を目的とする。【解決手段】本発明のレーザー加工ヘッド24は、一端から入射したレーザー光を他端から加工対象物POに向けて照射させ、加工対象物POとでコンデンサを構成し、自身と加工対象物POとのギャップGを測定するための静電容量センサ70の検出部として機能する筒体100と、筒体100の外周を囲む第1部分111、及び、筒体100に対し筒体100の前記一端側に配置され、筒体100の軸方向から見て筒体100の前記一端側の端面104Aの少なくとも一部の範囲に重なる第2部分116を有するガード電極110(シールド部材の一例)と、を備える。【選択図】図2B
Bibliography:Application Number: JP20190184448