CHARGED PARTICLE BEAM DEVICE

• Main Authors: UEMOTO ATSUSHI, MURAKI REINA, ASAHATA TATSUYA
• Format: Patent
• Language: English; Japanese
• Published: 08.04.2021
• Subjects: BASIC ELECTRIC ELEMENTS; ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS; ELECTRICITY; INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES; MEASURING; PHYSICS; TESTING

To accelerate automatic micro sampling.SOLUTION: A charged particle beam device is configured to automatically prepare a sample piece from a sample. The charged particle beam device comprises: a charged particle beam radiation optical system which radiates a charged particle beam; a sample stage which moves with the sample mounted thereon; sample piece transfer means which holds and carries the sample piece separated and extracted from the sample; a holder fixing base holding a sample piece holder to which the sample piece is transferred; and a computer which controls a position with respect to a second object on the basis of a model of machine learning in which first information including a first image of a first object is learnt, and second information including a second image which is acquired by the radiation of the charged particle beam.SELECTED DRAWING: Figure 1 【課題】自動マイクロサンプリングを高速化できること。【解決手段】荷電粒子ビーム装置は、試料から試料片を自動的に作製する荷電粒子ビーム装置であって、荷電粒子ビームを照射する荷電粒子ビーム照射光学系と、前記試料を載置して移動する試料ステージと、前記試料から分離および摘出する前記試料片を保持して搬送する試料片移設手段と、前記試料片が移設される試料片ホルダを保持するホルダ固定台と、第１対象物の第１画像を含む第１情報が学習された機械学習のモデルと、前記荷電粒子ビームの照射によって取得した第２画像を含む第２情報とに基づいて第２対象物に関する位置の制御を行うコンピュータと、を備える荷電粒子ビーム装置である。【選択図】図１