DEVICE AND METHOD FOR DICING

• Main Authors: ARAI YUSUKE, FUKAYA HIRONORI, TSUSHIMA TAKEO, TAKEDA KUNIYOSHI
• Format: Patent
• Language: English; Japanese
• Published: 08.04.2021
• Subjects: BASIC ELECTRIC ELEMENTS; DRESSING OR CONDITIONING OF ABRADING SURFACES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS; GRINDING; MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; PERFORMING OPERATIONS; POLISHING; SEMICONDUCTOR DEVICES; TRANSPORTING

To provide a device and a method for dicing which can prevent occurrence of an error in alignment of a work-piece during dicing processing and prevent a blade from interfering with a jig.SOLUTION: A method for dicing includes: a step of measuring an outer shape of a work-piece (W) while holding the work-piece on a handler (50); a step of calculating a position of a division scheduled line (CL1) of the work-piece on the basis of a measured result of the outer shape of the work-piece and performing alignment of the work-piece with a jig (J1) so that a line formed along the division scheduled line of the work-piece, whose thickness is corresponding to a blade thickness of a blade (32) for performing dicing processing to the work-piece is fitted to a jig groove of the jig; and a step of performing the dicing processing along the division scheduled line to the work-piece, while making the jig adsorb and hold the work-piece.SELECTED DRAWING: Figure 1 【課題】 ダイシング加工時におけるワークのアライメントエラーの発生を防止することができ、かつ、ブレードと治具との干渉を防止することが可能なダイシング装置及び方法を提供する。【解決手段】 ダイシング方法は、ワーク（Ｗ）をハンドラ（５０）に保持した状態でワークの外形を測定するステップと、ワークの外形の測定結果に基づいてワークの分割予定ライン（ＣＬ１）の位置を算出し、ワークの分割予定ラインに沿うラインであって、ワークのダイシング加工を行うためのブレード（３２）の刃厚に対応する太さのラインが治具の治具溝に収まるように、ワークと治具（Ｊ１）とのアライメントを行うステップと、ワークを治具により吸着保持して、ワークに対して分割予定ラインに沿ってダイシング加工を行うステップとを含む。【選択図】 図１