CERAMIC COMPONENT FOR MAGNETRON AND MANUFACTURING METHOD THEREOF

• Main Authors: HOSHINO MASANORI, SATO HIDEKI
• Format: Patent
• Language: English; Japanese
• Published: 18.03.2021
• Subjects: ARTIFICIAL STONE; BASIC ELECTRIC ELEMENTS; CEMENTS; CERAMICS; CHEMISTRY; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDINGMATERIALS; CONCRETE; ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS; ELECTRICITY; LIME, MAGNESIA; METALLURGY; REFRACTORIES; SLAG; TREATMENT OF NATURAL STONE

To provide a highly productive alumina component for magnetron, in which the joint strength of a terminal portion is improved as compared with that of a ring portion and the occurrence of leak defects is suppressed.SOLUTION: In a ceramic component for magnetron in which a terminal metallizing layer and a ring metallizing layer made of refractory metal such as molybdenum and tungsten are formed on a terminal portion and a ring portion formed on the same surface of a ceramic component body, and a terminal nickel plating layer and a ring nickel plating layer are formed on the surfaces of the terminal metallizing layer and the ring metallizing layer, respectively, the height of a ceramic portion of the terminal portion is 0.01 to 0.06 mm higher than the height of the ceramic portion of the ring portion.SELECTED DRAWING: Figure 1 【課題】端子部の接合強度がリング部よりも向上してリーク不良の発生を抑制して生産性の高いマグネトロン用アルミナ部品を提供する。【解決手段】セラミックス部品本体の同一面に形成された端子部およびリング部にそれぞれモリブデンやタングステンのような高融点金属からなる端子部メタライズ層およびリング部メタライズ層を形成し、この端子部メタライズ層およびリング部メタライズ層の表面にそれぞれ端子部ニッケルめっき層およびリング部ニッケルめっき層を形成したマグネトロン用セラミックス部品において、前記端子部セラミックス部の高さがリング部セラミックスの高さよりも０．０１〜０．０６ｍｍ高いことを特徴とする。【選択図】図１