CATHODE MEMBER FOR ELECTRON BEAM PRODUCTION, AND METHOD FOR MANUFACTURING THE SAME
To propose a cathode member for electron beam production, which is superior in electron emission characteristic, and a method for manufacturing the same.SOLUTION: A cathode member for electron beam production according to the present invention comprises a single or two phases of a compound containin...
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Main Authors | , , , |
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Format | Patent |
Language | English Japanese |
Published |
11.03.2021
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Subjects | |
Online Access | Get full text |
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Summary: | To propose a cathode member for electron beam production, which is superior in electron emission characteristic, and a method for manufacturing the same.SOLUTION: A cathode member for electron beam production according to the present invention comprises a single or two phases of a compound containing iridium and cerium, which account for 95 area % or more, and of which the maximum equivalent circle diameter of a cross section which is perpendicular to a longitudinal direction is 5 mm or more. A method for manufacturing the cathode member for electron beam production comprises: a melting step of melting a metal cerium material and a metal iridium material to obtain an ingot material; a pulverizing step of pulverizing the ingot material into a pulverized material; a sintering step of sintering the pulverized material of the ingot material in a hight-temperature, high-humidity atmosphere to obtain a sintered material for crystal material production; and a crystal material producing step of using the sintered material for crystal material production to produce a crystal material of a compound containing iridium and cerium by a floating zone method.SELECTED DRAWING: Figure 1
【課題】電子放出特性に優れた電子ビーム生成用カソード部材と、その製造方法を提案する。【解決手段】本発明の電子ビーム生成用カソード部材は、イリジウムとセリウムからなる化合物の単相または2相が95面積%以上を占め、長軸方向に垂直な断面の最大円相当直径が5mm以上である。該電子ビーム生成用カソード部材製造方法は、金属セリウム原料と金属イリジウム原料を溶解して溶製材を得る溶解工程と、前記溶製材を粉砕して粉砕物を得る粉砕工程と、前記溶製材の粉砕物を高温高圧雰囲気で焼結して結晶体作製用焼結材を得る焼結工程と、前記結晶体作製用焼結材を用い、フローティングゾーン法でイリジウムとセリウムからなる化合物の結晶体を作製する結晶体作製工程とを含む。【選択図】図1 |
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Bibliography: | Application Number: JP20190159587 |