SENSOR DEVICE

• Main Authors: NAKATSUCHI HIROKI, HIROHATA SHIGETO, IKEDA UKYO
• Format: Patent
• Language: English; Japanese
• Published: 01.03.2021
• Subjects: MEASURING; MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUIDLEVEL; METERING BY VOLUME; PHYSICS; TESTING

To provide a sensor device that has a structure capable of reducing an influence of mounting variation such as the thickness variation of a circuit board on the positioning accuracy of a sensor element in a channel.SOLUTION: A sensor device includes a detecting portion that has a sensor element installed in a passage to detect physical amount related to gas passing through the passage, a circuit board electrically connected to the detecting portion, a fixing member that fixes the circuit board and the detecting portion respectively, and a passage forming portion. The passage forming portion has a first pat to which the fixing member is fixed, a second part opposing to the circuit board via a gap, and a third part that is one of surfaces forming the passage and opposes to the sensor element via the passage, on the same surface.SELECTED DRAWING: Figure 2 【課題】回路基板の厚さばらつき等の実装ばらつきが、流路におけるセンサ素子の位置決め精度に与える影響を低減可能な構造であるセンサ装置を提供する。【解決手段】 センサ装置は、通路に設置されて通路を通過する気体に関する物理量を検出するセンサ素子を有する検出部と、検出部と電気的に接続する回路基板と、回路基板と検出部とをそれぞれ固定する固定部材と、通路形成部と、を備える。通路形成部は、固定部材が固定された第一部分と、回路基板と間隙を介して対向する第二部分と、通路を形成する面の一つでありセンサ素子と通路を介して対向する第三部分と、を同一面上に有する。【選択図】図２