ELECTRONIC MICROSCOPE

• Main Authors: AKINAGA HIROYUKI, YANAI TOSHIYUKI, KAWAKITA JUMPEI, XIN ZHI, SHIMA HISASHI, NAITO YASUHISA, OKUDA YUJI
• Format: Patent
• Language: English; Japanese
• Published: 01.03.2021
• Subjects: BASIC ELECTRIC ELEMENTS; ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS; ELECTRICITY; INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES; MEASURING; PHYSICS; TESTING

To provide an electron microscope that can do an operand observation.SOLUTION: An electron microscope 1 includes: an electronic characteristic measuring circuit 40, which detects a photoelectron as an electron emitted from a measurement sample 30 by irradiating the measurement sample 30 with light or radiation, generates an image of the measurement sample 30 on the basis of the detected electron, and flows a voltage or a current between a first electrode and a second electrode of an element part in the measurement sample 30; and a potential controller 44 for equalizing the potential of the second electrode and the potential of a holder 11 on which the measurement sample 30 is to be placed.SELECTED DRAWING: Figure 1 【課題】オペランド観察できる電子顕微鏡を提供する。【解決手段】電子顕微鏡１は、光又は放射線を測定試料３０に照射することで測定試料３０から出射した電子としての光電子を検出し、検出した電子に基づいて測定試料３０の画像を生成し、測定試料３０に含まれる素子部の第１電極と第２電極の間に電圧を印加する又は電流を流す電気特性測定回路４０と、第２電極の電位と、測定試料３０を載置するホルダ１１の電位とを等電位にする電位制御装置４４とを備える。【選択図】図１