METHOD FOR PRODUCING NITROGEN ELEMENT-DOPED TITANIUM OXIDE

• Main Authors: ABE MASAYUKI, YOSHIKOSHI FUMITAKA, KATSUBE DAIKI, ONO SHINYA
• Format: Patent
• Language: English; Japanese
• Published: 01.03.2021
• Subjects: CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOIDCHEMISTRY; CHEMISTRY; COMPOUNDS CONTAINING METALS NOT COVERED BY SUBCLASSESC01D OR C01F; INORGANIC CHEMISTRY; METALLURGY; PERFORMING OPERATIONS; PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL; THEIR RELEVANT APPARATUS; TRANSPORTING

To provide an efficient production method for N element-doped TiO2.SOLUTION: A production method for N element-doped TiO2 according to the present invention includes steps of: disposing a TiO2 to be a target at a predetermined position in a vacuum chamber; evacuating the vacuum chamber; heating a nozzle to a predetermined temperature; and applying a supersonic molecular beam of NO molecules to the target from the nozzle while keeping the nozzle at the predetermined temperature.SELECTED DRAWING: Figure 2 【課題】 効率的なＮ元素ドープＴｉＯ２の製造方法を提供する。【解決手段】本発明に係るＮ元素ドープＴｉＯ２の製造方法は、ターゲットとなるＴｉＯ２を真空チャンバ内の所定位置に配置するステップと、真空チャンバを真空引きするステップと、ノズルを所定温度に加熱するステップと、ノズルを所定温度に維持しつつ、ノズルからＮＯ分子の超音速分子線をターゲットに照射するステップとを備える。【選択図】図２