CHARGED PARTICLE BEAM DEVICE AND CHARGED PARTICLE BEAM INSPECTION SYSTEM

• Main Authors: NAKAMURA YOHEI, MIWA TAKAFUMI, KIMIZUKA HEITA, FUKUDA MUNEYUKI, TANAKA JUNICHI, TSUNO NATSUKI
• Format: Patent
• Language: English; Japanese
• Published: 22.02.2021
• Subjects: BASIC ELECTRIC ELEMENTS; ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; SEMICONDUCTOR DEVICES

To provide a charged particle beam device and a charged particle beam inspection system, capable of estimating an electric characteristic of a sample including a capacity characteristic.SOLUTION: By using correspondence data (210) indicating correspondence between a node of a net list and coordinates on a sample SPL, a pulse generation condition (205) in irradiating the sample with a charged particle beam in a pulse shape, and the like, a charged particle beam device estimates an electric characteristic of the sample. A charged particle beam optical system (223) irradiates predetermined coordinates on the sample with a charged particle beam based on the pulse generation condition. A detector 219 actually measures an electron discharge amount depending on the irradiation. On a condition of irradiating a node on the net list corresponding to the predetermined coordinates with a charged particle beam on the basis of the pulse generation condition, a discharge amount calculation unit 227 calculates an electron discharge amount depending on temporal variation in a charged state following the irradiation. A comparator 230 compares an actual measurement result by the detector 219 with a calculation result by the discharge amount calculation unit 227.SELECTED DRAWING: Figure 2B 【課題】容量特性を含めた試料の電気特性を推定可能な荷電粒子線装置および荷電粒子線検査システムを提供する。【解決手段】荷電粒子線装置は、ネットリストのノードと試料ＳＰＬ上の座標との対応関係を表す対応データ（２１０）と、試料に荷電粒子線をパルス状に照射する際のパルス化条件（２０５）等を用いて試料の電気特性を推定する。荷電粒子線光学系（２２３）は、試料上の所定の座標に対し、パルス化条件に基づく荷電粒子線を照射し、検出器２１９は、それに応じた電子の放出量を実測する。放出量演算部２２７は、所定の座標に対応するネットリスト上のノードに対してパルス化条件に基づき荷電粒子線を照射した条件で、それに伴う帯電状態の時間的変化に応じた電子の放出量を演算する。比較器２３０は、検出器２１９による実測結果と放出量演算部２２７による演算結果とを比較する。【選択図】図２Ｂ