PLASMA GENERATOR
To achieve high operability of a plasma generator.SOLUTION: The plasma generator, irradiating a target with plasma, includes a first electrode applied with a negative pole of a DC power supply and a second electrode applied with a positive pole of the DC power supply, which are arranged so that fron...
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Main Author | |
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Format | Patent |
Language | English Japanese |
Published |
22.02.2021
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Subjects | |
Online Access | Get full text |
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Summary: | To achieve high operability of a plasma generator.SOLUTION: The plasma generator, irradiating a target with plasma, includes a first electrode applied with a negative pole of a DC power supply and a second electrode applied with a positive pole of the DC power supply, which are arranged so that front ends thereof face each other, and a first magnet and a second magnet forming a magnetic field in such a direction as to move to the target around the front ends of the first electrode and the second electrode facing each other.SELECTED DRAWING: Figure 3
【課題】プラズマ発生装置の操作性を良くする。【解決手段】本実施形態に係るプラズマ発生装置は、ターゲットに向かってプラズマを照射するプラズマ発生装置であって、先端が相互に対向するように配置され、直流電源の負極が印加される第1電極、及び、直流電源の正極が印加される第2電極と、相互に離間して配置され、相互に対向する第1電極の先端と第2電極の先端の周囲に、ターゲットへ向かう方向の磁界を形成する第1磁石及び第2磁石と、を備える。【選択図】図3 |
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Bibliography: | Application Number: JP20190142238 |