SOLID-STATE IMAGING ELEMENT AND IMAGING DEVICE

• Main Authors: MITSUNAKA TAKESHI, SATO DAIKI
• Format: Patent
• Language: English; Japanese
• Published: 04.02.2021
• Subjects: BASIC ELECTRIC ELEMENTS; COLORIMETRY; ELECTRIC COMMUNICATION TECHNIQUE; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT,POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRA-RED,VISIBLE OR ULTRA-VIOLET LIGHT; MEASURING; PHYSICS; PICTORIAL COMMUNICATION, e.g. TELEVISION; RADIATION PYROMETRY; SEMICONDUCTOR DEVICES; TESTING

To realize a solid-state imaging element by a method that is easy to handle in terms of design, and selectively detect the fluorescence emitted from a measurement sample while blocking excitation light incident from a vertical upward direction.SOLUTION: A solid-state imaging element (100) includes an SPAD (11), a first metal wiring layer (121), and a second metal wiring layer (14), in which the first metal wiring layer (121) covers a part of the SPAD (11), and the second metal wiring layer (14) covers at least the entire SPAD (11) by being formed so as to block a window opening (15) and the remaining area of the SPAD (11) by using the end of the first metal wiring layer (121) as a start point.SELECTED DRAWING: Figure 1 【課題】設計上対応が容易な方法で固体撮像素子を実現し、垂直上方向から入射する励起光を遮断しつつ、測定試料から放出された蛍光を選択的に検出する。【解決手段】固体撮像素子（１００）は、ＳＰＡＤ（１１）と、第１の金属配線層（１２１）及び第２の金属配線層（１４）と、を有し、第１の金属配線層（１２１）は、ＳＰＡＤ（１１）の一部を被覆し、第２の金属配線層（１４）は、第１の金属配線層（１２１）の端を起点に、窓開口（１５）とＳＰＡＤ（１１）との残りの面積を遮光するように形成されることで、少なくともＳＰＡＤ（１１）の全体を被覆する。【選択図】図１