INSPECTION TOOL FOR INSPECTING ELECTRICAL CHARACTERISTICS

• Main Author: KUMAKURA HIROYUKI
• Format: Patent
• Language: English; Japanese
• Published: 04.02.2021
• Subjects: BASIC ELECTRIC ELEMENTS; CURRENT COLLECTORS; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; LINE CONNECTORS; MEASURING; MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES; PHYSICS; SEMICONDUCTOR DEVICES; TESTING

To provide an inspection tool for inspecting electrical characteristics having excellent durability to the inspection for electrical characteristics of pads or bumps which are formed at fine pitches.SOLUTION: An inspection probe sheet 1 comprises: a first flexible sheet 10 having a plurality of through electrodes 14 which have concave parts 12 on a first surface 11a and have convex parts 13 on a second surface 11b; a second flexible sheet 20 having a plurality of through electrodes 24 which have concave parts 22 on a first surface 21a and have convex parts 23 on a second surface 21b; and conductive resin 30 with which the concave parts 12, 22 of the through electrodes 14, 24 are filled to connect the first surface 11a of the first flexible sheet and the first surface 21a of the second flexible sheet.SELECTED DRAWING: Figure 1 【課題】ファインピッチに形成されたパッドやバンプの電気特性の検査に対し、優れた耐久性を有する電気特性の検査冶具を提供する。【解決手段】検査プローブシート１は、第１面１１ａに凹部１２を有し、第２面１１ｂに凸部１３を有する貫通電極１４を複数有する第１のフレキシブルシート１０と、第１面２１ａに凹部２２を有し、第２面２１ｂに凸部２３を有する貫通電極２４を複数有する第２のフレキシブルシート２０と、貫通電極１４、２４の凹部１２、２２に充填され、第１のフレキシブルシートの第１面１１ａと第２のフレキシブルシートの第１面２１ａとを連結する導電性樹脂３０とを備える。【選択図】図１