BARRIER FILM

• Main Authors: YUKAWA TOMIYUKI, KUDO TAKUMA, TAKAHASHI MASAYASU, IWAHASHI HIROYUKI, MORIMOTO TARO
• Format: Patent
• Language: English; Japanese
• Published: 04.02.2021
• Subjects: CHEMICAL SURFACE TREATMENT; CHEMISTRY; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING MATERIAL WITH METALLIC MATERIAL; COATING METALLIC MATERIAL; DIFFUSION TREATMENT OF METALLIC MATERIAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL; LAYERED PRODUCTS; LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT ORNON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM; METALLURGY; PERFORMING OPERATIONS; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; TRANSPORTING

To provide a barrier film that is excellent in transparency and excellent in water vapor barrier properties after storage under a high temperature and high humidity environment.SOLUTION: The barrier film is provided with a resin substrate 11, a first chemical vapor deposition layer 12, and a second chemical vapor deposition layer 13 in this order. The first chemical vapor deposition layer contains silicon, oxygen, and carbon, and the ratio of carbon C1 is 15% or more and 40% or less with respect to 100% of the total of the three elements of silicon, oxygen, and carbon, and the second chemical vapor deposition layer contains silicon, oxygen, and carbon, and the ratio of carbon C2 is 1% or more and 20% or less with respect to 100% of the total of the three elements of silicon, oxygen, and carbon. The ratio of carbon C1 in the first chemical vapor deposition layer and the ratio of carbon C2 in the second chemical vapor deposition layer satisfy C1>C2, and the water vapor permeability is 5.0×10-2 g/m2/day or less.SELECTED DRAWING: Figure 1 【課題】透明性に優れ、かつ高温高湿環境下での保存後の水蒸気バリア性に優れたバリア性フィルム。【解決手段】樹脂基材１１と、第１の化学気相蒸着層１２と、第２の化学気相蒸着層１３とをこの順に備えるものであって、前記第１の化学気相蒸着層が、ケイ素、酸素、および炭素を含み、ケイ素、酸素、および炭素の３元素の合計１００％に対して、炭素の割合Ｃ１が１５％以上４０％以下であり、前記第２の化学気相蒸着層が、ケイ素、酸素、および炭素を含み、ケイ素、酸素、および炭素の３元素の合計１００％に対して、炭素の割合Ｃ２が１％以上２０％以下であり、前記第１の化学気相蒸着層中の炭素の割合Ｃ１と前記第２の化学気相蒸着層中の炭素の割合Ｃ２が、Ｃ１＞Ｃ２を満たし、水蒸気透過度が、５．０×１０−２ｇ／ｍ２／ｄａｙ以下である。【選択図】図１