JOINING METHOD AND JOINING DEVICE

To provide a new method for joining objects together using metal nanoparticle paste.SOLUTION: A method of joining two objects together using metal nanoparticle paste includes a step (1) of applying paste (12) to one object (10), a step (2) of placing the other object (11) on the paste and positionin...

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Bibliographic Details
Main Authors TAKIZAWA HIROTANE, FURUSAWA AKIO, TAZAKI MANABU, HAYASHI YAMATO
Format Patent
LanguageEnglish
Japanese
Published 07.01.2021
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Summary:To provide a new method for joining objects together using metal nanoparticle paste.SOLUTION: A method of joining two objects together using metal nanoparticle paste includes a step (1) of applying paste (12) to one object (10), a step (2) of placing the other object (11) on the paste and positioning the paste with the objects separated by a predetermined distance, a step (3) of heating the objects and the paste between the objects while maintaining the separated state until the paste viscosity decreases to a predetermined value, a first pressurizing step (4) of heating the objects and the paste between the objects to a predetermined temperature at which metal nanoparticles can be sintered and/or melt-bonded while applying predetermined first pressure to between the objects and a second pressurizing step (5) of applying predetermined second pressure larger than the first pressure to between the objects.SELECTED DRAWING: Figure 1 【課題】 金属ナノ粒子ペーストを用いて対象物を接合する新たな方法を提供する。【解決手段】金属ナノ粒子ペーストを用いて、2つの対象物を接合する方法は、(1)一方の対象物(10)にペースト(12)を塗布する工程、(2)他方の対象物(11)をペースト上に配置し、対象物が所定距離で離間した状態でペーストを位置させる工程、(3)離間した状態を維持して対象物およびその間のペーストをペースト粘度が所定値に低下するまで加熱する工程、(4)所定の第1圧力を対象物間に加えながら、対象物およびその間のペーストを金属ナノ粒子の焼結接合および/または溶融接合が可能な所定温度まで加熱する第1加圧工程、ならびに(5)第1圧力より大きい所定の第2圧力を対象物間に加える第2加圧工程を含んで成る。【選択図】 図1
Bibliography:Application Number: JP20190114561