POROUS PAD AND VACUUM CHUCK DEVICE

• Main Authors: TAKADA ATSUSHI, NGUYEN TUNG THANH, OHASHI KYOSUKE, TAKADA DAICHI
• Format: Patent
• Language: English; Japanese
• Published: 24.12.2020
• Subjects: ARTIFICIAL STONE; BASIC ELECTRIC ELEMENTS; CEMENTS; CERAMICS; CHEMISTRY; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDINGMATERIALS; CONCRETE; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; LIME, MAGNESIA; METALLURGY; REFRACTORIES; SEMICONDUCTOR DEVICES; SLAG; TREATMENT OF NATURAL STONE

To provide a porous pad and a vacuum chuck device that can prevent the position of an installed work from shifting with respect to the porous pad.SOLUTION: A porous pad 20 includes an installation surface 20a on which a workpiece W is installed and allows fluid to pass therethrough. The porous pad 20 includes a porous ceramic portion 25 that has a plurality of particles 26 formed so as to be connected to each other, and in which pores 29 are formed between the plurality of particles 26, and a non-slip layer 27 that has a larger coefficient of static friction with respect to the workpiece W than the porous ceramic portion 25, and is formed on the outer surface of the particles 26 and is exposed on the installation surface 20a.SELECTED DRAWING: Figure 3 【課題】設置されたワークの位置が多孔質パッドに対してずれることを抑制できる多孔質パッド及び真空チャック装置を提供する。【解決手段】多孔質パッド２０はワークＷが設置される設置面２０ａを備え、流体を通過させる。多孔質パッド２０は、互いに連なるように形成される複数の粒子２６を有し、複数の粒子２６の間に気孔２９が形成される多孔質セラミック部２５と、ワークＷに対する静摩擦係数が多孔質セラミック部２５よりも大きく、粒子２６の外面に形成され、設置面２０ａに露出する滑り止め層２７と、を備える。【選択図】図３