MANUFACTURING METHOD OF DIAMOND SUBSTRATE

• Main Authors: HORIUCHI HIROSHI, IIZUKA YUKIHIKO, IDE TOSHIHISA, UMEZAKI YOSUKE
• Format: Patent
• Language: English; Japanese
• Published: 17.12.2020
• Subjects: AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUSPOLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR; CHEMICAL SURFACE TREATMENT; CHEMISTRY; CLADDING OR PLATING BY SOLDERING OR WELDING; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING MATERIAL WITH METALLIC MATERIAL; COATING METALLIC MATERIAL; CRYSTAL GROWTH; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; DIFFUSION TREATMENT OF METALLIC MATERIAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL; MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR; METALLURGY; PERFORMING OPERATIONS; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITHDEFINED STRUCTURE; REFINING BY ZONE-MELTING OF MATERIAL; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITHDEFINED STRUCTURE; SINGLE-CRYSTAL-GROWTH; SOLDERING OR UNSOLDERING; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; TRANSPORTING; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL ORUNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; WELDING; WORKING BY LASER BEAM

To provide a method for manufacturing a diamond substrate efficiently.SOLUTION: A manufacturing method of a diamond substrate includes following steps: a formation step, for forming a diamond layer on a support substrate to obtain a composite substrate; a processing step, for processing the composite substrate at an approximately same temperature as the support substrate in the formation step to obtain processed substrate; and a separation step, for separating the support substrate from the processed substrate, to thereby obtain a diamond substrate comprising the diamond layer.SELECTED DRAWING: Figure 1 【課題】本発明は、効率的にダイヤモンド基板を製造する方法を提供することを課題とする。【解決手段】以下の各工程を含む、ダイヤモンド基板の製造方法を提供することで課題は解決される：支持基板上にダイヤモンド層を形成して複合基板とする、形成工程；複合基板を、前記形成工程における支持基板と略同一温度下で加工して被加工基板とする、加工工程；被加工基板から支持基板を分離して、ダイヤモンド層からなるダイヤモンド基板を得る、分離工程。【選択図】図１