METHOD FOR CREATING ELECTRODE LAYOUT OF INERTIAL SENSOR

• Main Authors: TAINAKA YASUSHI, ISOBE ATSUSHI, WATANABE KEIKI, MORI KEIJIRO
• Format: Patent
• Language: English; Japanese
• Published: 03.12.2020
• Subjects: INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT; MEASURING; MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION,OR SHOCK; PHYSICS; TESTING

To increase the performance of an inertial sensor.SOLUTION: A method for creating an electrode layout of an inertial sensor includes the steps of: calculating a surface displacement distribution of a movable part in a high-order resonance mode; setting an integration region as a part of the movable part; and integrating the surface displacement distribution in the integration region. The method for creating an electrode layout of an inertial sensor also includes the steps of: determining whether the absolute value of the integrated value is not larger than a preset value; and determining the region of a fixed part which faces the integration region when the absolute value of the integrated value is not larger than the predetermined value to be an electrode arrangement region.SELECTED DRAWING: Figure 27 【課題】慣性センサの性能を向上する。【解決手段】慣性センサの電極レイアウト作成方法は、高次共振モードに対応する可動部の表面変位分布を算出する工程と、可動部の一部領域である積分領域を設定する工程と、積分領域で表面変位分布を積分する工程とを有する。さらに、慣性センサの電極レイアウト作成方法は、積分値の絶対値が予め設定された規定値以下になっているかを判断する工程と、積分値の絶対値が規定値以下となった場合の積分領域に相対する固定部の領域を電極配置領域として決定する工程とを備える。【選択図】図２７