GAS LEAKAGE INSPECTION METHOD AND GAS LEAKAGE INSPECTION DEVICE

To provide a gas leakage inspection method and a gas leakage inspection device capable of identifying gas permeation from any of a plurality of seal materials.SOLUTION: In a gas leakage inspection method, a measuring step includes: a gas amount measuring step of measuring the amount of gas to the ou...

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Bibliographic Details
Main Authors HARADA TAKESHI, SHIMOMURA HIROSHI
Format Patent
LanguageEnglish
Japanese
Published 01.10.2020
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Summary:To provide a gas leakage inspection method and a gas leakage inspection device capable of identifying gas permeation from any of a plurality of seal materials.SOLUTION: In a gas leakage inspection method, a measuring step includes: a gas amount measuring step of measuring the amount of gas to the outside of a first seal material and a second seal material in time series; and a determination step of determining a first permeation state where the gas to be inspected has permeated through the first seal material when a first inflection point of inclination of the amount of the gas to the outside per unit time is detected after the lapse of the first predetermined time after introducing the gas to be inspected, and also determining a second permeation state where the gas to be inspected has permeated through the second seal material when a second inflection point of inclination of the amount of the gas to the outside per unit time is detected.SELECTED DRAWING: Figure 4 【課題】複数のシール材のうちのいずれから透過しているかを特定することが可能なガス漏れ検査方法及びガス漏れ検査装置を提供すること。【解決手段】測定する工程は、時系列で第1シール材及び第2シール材の外側へのガス量を測定するガス量測定工程と、検査対象ガスを導入してから第1の所定時間経過後に、単位時間当たりの外側へのガス量の傾きの第1の変曲点を検出したときに、検査対象ガスが第1シール材を透過した第1の透過状態と判定し、単位時間当たりの外側へのガス量の傾きの第2の変曲点を検出したときに、検査対象ガスが第2シール材を透過した第2の透過状態と判定する判定工程と、を有するガス漏れ検査方法である。【選択図】図4
Bibliography:Application Number: JP20190061015