LOW-HUMIDITY AIR SUPPLY DEVICE

• Main Authors: MASUDA KATSUHIRO, YAMAGUCHI MASAFUMI, UEDA AKIRA
• Format: Patent
• Language: English; Japanese
• Published: 01.10.2020
• Subjects: AIR-CONDITIONING, AIR-HUMIDIFICATION, VENTILATION, USE OF AIRCURRENTS FOR SCREENING; BLASTING; HEATING; LIGHTING; MECHANICAL ENGINEERING; RANGES; VENTILATING; WEAPONS

To provide a low-humidity air supply device which achieves downsizing.SOLUTION: A low-humidity air supply device 1 supplies low-humidity air to an interior of a clean room 100. The low-humidity air supply device 1 includes: an intake part 3 which is connected to the interior of the clean room 100 and takes air AR1 in the clean room 100 thereinto; a cooling part 4 which cools the air AR1; a dehumidification part 7 which dehumidifies cooled air AR2; and a supply part 8 which is connected to the interior of the clean room 100 and supplies air AR4 dehumidified by the dehumidification part 7 to the interior of the clean room 100. The supply part 8 is formed by a box shaped duct 81 which allows the air AR4 to pass. The duct 81 is a part of a housing 20 forming an outermost sheath of the low-humidity air supply device 1.SELECTED DRAWING: Figure 2 【課題】小型化が図られる低湿空気供給装置を提供すること。【解決手段】低湿空気供給装置１は、低湿空気をクリーンルーム１００内に供給する。この低湿空気供給装置１は、クリーンルーム１００内に接続され、クリーンルーム１００内の空気ＡＲ１を取り込む取込部３と、空気ＡＲ１を冷却する冷却部４と、冷却された空気ＡＲ２を除湿する除湿部７と、クリーンルーム１００内に接続され、除湿部７により除湿された空気ＡＲ４をクリーンルーム１００内に供給する供給部８とを備える。供給部８は、空気ＡＲ４が通過可能な箱状をなすダクト８１で構成され、ダクト８１は、低湿空気供給装置１の最外装を構成する筐体２０の一部である。【選択図】図２