A-B CRYSTAL WITHOUT CRYSTAL LATTICE CURVATURE
To provide a single crystal formed of an III-V, IV-IV or II-VI compound semiconductor crystal, having inclusions or deposits having lower concentration compared with the conventional compound semiconductor crystal and nevertheless, having no- or extremely small curvature.SOLUTION: In the single crys...
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Main Authors | , , |
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Format | Patent |
Language | English Japanese |
Published |
01.10.2020
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Subjects | |
Online Access | Get full text |
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Summary: | To provide a single crystal formed of an III-V, IV-IV or II-VI compound semiconductor crystal, having inclusions or deposits having lower concentration compared with the conventional compound semiconductor crystal and nevertheless, having no- or extremely small curvature.SOLUTION: In the single crystal formed of an III-V, IV-IV or an II-VI compound semiconductor crystal, the concentration of III-, IV- or II- deposits and/or nonstoichiometric III-V-, IV-IV- or II-VI inclusions in the III-V-, IV-IV- or II-VI-crystal is 1×104 cm-3 at the maximum.SELECTED DRAWING: Figure 2
【課題】従来の化合物半導体結晶と比較して、より低い濃度のインクルージョンまたは析出物を有し、それにもかかわらず湾曲がないまたは湾曲が非常にわずかである、それぞれのIII−V、IV−IVまたはII−VI化合物半導体結晶の単結晶の提供。【解決手段】III−、IV−またはII−の析出物および/またはIII−V−、IV−IV−またはII−VI−結晶中の非化学量論的III−V−、IV−IV−またはII−VIインクルージョンの濃度が、最大で1×104cm−3であるIII−V、IV−IVまたはII−VI化合物半導体結晶の単結晶。【選択図】図2 |
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Bibliography: | Application Number: JP20200106290 |