HYBRID SYSTEMS AND METHODS FOR CHARACTERIZING STRESS IN CHEMICALLY STRENGTHENED TRANSPARENT SUBSTRATES

To perform both EPCS measurement and LSP measurement in a single measurement system.SOLUTION: A hybrid measurement system 20 includes an evanescent prism coupling spectroscopy (EPCS) sub-system 100 and a light-scattering polarimetry (LSP) sub-system 200. The EPCS sub-system 100 includes an EPCS ligh...

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Main Authors NATHANIEL DAVID WETMORE, RYAN CLAUDE ANDREWS, JEREMIAH ROBERT JACOBSON, NEWCOMER GLENN ABRAM, RAJ BABAK ROBERT, PIERRE MICHEL BOUZI, ROSTISLAV VATCHEV ROUSSEV, STEPANOV VIKTOR, FURNAS WILLIAM JOHN, OLSON EVAN LEWIS
Format Patent
LanguageEnglish
Japanese
Published 24.09.2020
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Summary:To perform both EPCS measurement and LSP measurement in a single measurement system.SOLUTION: A hybrid measurement system 20 includes an evanescent prism coupling spectroscopy (EPCS) sub-system 100 and a light-scattering polarimetry (LSP) sub-system 200. The EPCS sub-system 100 includes an EPCS light source optically coupled to an EPCS detector system 140 through an EPCS coupling prism. The LSP sub-system 200 includes an LSP light source optically coupled to an optical compensator 230, and the optical compensator 230 is optically coupled to an LSP detector system 240 via an LSP coupling prism. A support structure supports the EPCS coupling prism and the LSP coupling prism to define a coupling prism assembly, which supports the two prisms at a measurement location. Stress measurement performed using the EPCS sub-system and the LSP sub-system are combined to fully characterize stress of a transparent chemically strengthened substrate.SELECTED DRAWING: Figure 2A 【課題】 単一の測定システムでEPCS測定及びLSP測定の両方を実施する。【解決手段】 ハイブリッド測定システム20は、エバネッセントプリズム結合分光法(EPCS)サブシステム100及び光散乱偏光測定(LSP)サブシステム200を含む。EPCSサブシステム100は、EPCS結合プリズムを通してEPCS検出器システム140に光学的に結合されたEPCS光源を含む。LSPサブシステム200は、光補償板230に光学的に結合されたLSP光源を含み、光補償板230は、LSP結合プリズムを介してLSP検出器システム240に光学的に結合される。支持構造体は、EPCS結合プリズム及びLSP結合プリズムを支持して結合プリズム組立体を画定し、これは上記2つのプリズムを測定位置において支持する。EPCSサブシステム及びLSPサブシステムを用いて行われる応力測定を組み合わせることにより、透明化学強化基板の応力を完全に特性決定する。【選択図】 図2A
Bibliography:Application Number: JP20200050974