GAS PURGE UNIT AND LOAD PORT DEVICE

• Main Authors: EMOTO ATSUSHI, IWAMOTO TADAMASA
• Format: Patent
• Language: English; Japanese
• Published: 17.09.2020
• Subjects: BASIC ELECTRIC ELEMENTS; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; SEMICONDUCTOR DEVICES

To provide a gas purge unit or the like capable of realizing smooth introduction of purification gas into a tightly-sealed transport container.SOLUTION: A gas purge unit for introducing purification gas into the inside of a purge object container having an opening through the opening, includes: a first blowing member having a first nozzle port for blowing the purification gas toward the inside of the purge object container, and placed along a side of the opening; and a second blowing member placed at a position farther from the opening than the first nozzle port, having a second nozzle port for blowing the purification gas toward the inside of the purge object container, placed along the side, where the two or more pairs of blowing members consisting of the first blowing member and the second blowing member are placed by so as to correspond to each side of the opening.SELECTED DRAWING: Figure 6 【課題】密封搬送容器内への清浄化ガスの円滑な導入を実現し得るガスパージユニット等を提供する。【解決手段】開口を有するパージ対象容器の内部に、前記開口を通して清浄化ガスを導入させるガスパージユニットであって、前記パージ対象容器の内部に向けて清浄化ガスを吹き出す第１ノズル口を有し、前記開口の側辺に沿って配置される第１吹き出し部材と、前記第１ノズル口より前記開口から遠い位置に配置され、前記パージ対象容器の内部に向けて清浄化ガスを吹き出す第２ノズル口を有し、前記側辺に沿って配置される第２吹き出し部材と、を有し、前記第１吹き出し部材と前記第２吹き出し部材とからなる１組の吹き出し部材が、前記開口のそれぞれの側辺に対応するように、２組以上配置されているガスパージユニット。【選択図】図６