DEVICE, AIR-INTAKE UNIT, AND LIQUID EJECTION DEVICE

To suppress deterioration of adhesion between a temperature regulation member and a substrate.SOLUTION: A device according to an embodiment of the disclosed technique, comprises a temperature regulating member causing an outer circumferential face to contact a substrate being transferred with a liqu...

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Main Authors SHIBAZAKI HIDENAO, SATO TOSHIYA, ISHIKAWA TEIICHIRO, TODA NAOHIRO, HAMAGUCHI MASAYA, KOMINE YUSUKE, THEN HUI ZEE
Format Patent
LanguageEnglish
Japanese
Published 10.09.2020
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Summary:To suppress deterioration of adhesion between a temperature regulation member and a substrate.SOLUTION: A device according to an embodiment of the disclosed technique, comprises a temperature regulating member causing an outer circumferential face to contact a substrate being transferred with a liquid adhering thereon to heat or cool the substrate, and an intake unit on the contact-starting side for sucking air present between the substrate and the temperature regulating member at an upstream side in the transfer direction relative to the contact position whereon the substrate and the temperature regulating member contact with each other.SELECTED DRAWING: Figure 1 【課題】温度調節部材と基材との密着性の低下を抑制すること。【解決手段】開示の技術の一態様に係る装置は、液体が付与されて搬送される基材に外周面を接触させ、前記基材を加熱又は冷却する温度調節部材と、前記基材と前記温度調節部材との接触位置の搬送方向における上流側で、前記基材と前記温度調節部材との間の空気を吸い込む接触開始側吸気部と、を有する。【選択図】図1
Bibliography:Application Number: JP20200026566