CRYOPUMP AND METHOD FOR REGENERATING CRYOPUMP

To provide a cryopump that can be cooled in a short time.SOLUTION: A cryopump introduces a humidification gas into an exhaust space 10 and increases relative humidity of the exhaust space 10 before cooling a baffle 15, a shield 17 and a cryopanel 16 arranged in the exhaust space 10. Vacuum heat insu...

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Bibliographic Details
Main Authors YASUDA JUNICHI, MURAYAMA YOSHINOBU
Format Patent
LanguageEnglish
Japanese
Published 10.09.2020
Subjects
BLASTING
HEATING
LIGHTING
MECHANICAL ENGINEERING
POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS
PUMPS
PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
WEAPONS
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Summary:To provide a cryopump that can be cooled in a short time.SOLUTION: A cryopump introduces a humidification gas into an exhaust space 10 and increases relative humidity of the exhaust space 10 before cooling a baffle 15, a shield 17 and a cryopanel 16 arranged in the exhaust space 10. Vacuum heat insulation effect increases as the relative humidity increases, and freezing time is shortened. The cryopump may measure relative humidity of the exhaust space 10 and, when the relative humidity is less than a reference relative humidity, introduce atmospheric air as a humidification gas.SELECTED DRAWING: Figure 1 【課題】冷却時間が短いクライオポンプを提供する。【解決手段】排気空間１０に配置されたバッフル１５、シールド１７、クライオパネル１６を冷却する前に、排気空間１０に加湿ガスを導入し、排気空間１０の相対湿度を増加させる。相対湿度が大きくなると真空断熱効果が大きくなり、冷凍時間が短縮される。排気空間１０の相対湿度を測定し、基準相対湿度よりも小さい場合に大気を加湿ガスとして導入してもよい。【選択図】図１
Bibliography:Application Number: JP20190041937