PRESSURE SENSOR

• Main Author: SASAHARA TETSUYA
• Format: Patent
• Language: English; Japanese
• Published: 31.08.2020
• Subjects: MEASURING; MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER,MECHANICAL EFFICIENCY, OR FLUID PRESSURE; PHYSICS; TESTING

To provide a pressure sensor capable of accurately detecting or correcting temperature and advantageous for downsizing.SOLUTION: The pressure sensor comprises: a membrane causing deformation corresponding to pressure; a first resistor group including first and third resistors arranged at a first strain position having predetermined strain characteristics on the membrane and second and fourth resistors arranged at a second strain position having strain characteristics different from those at the first strain position, and forming a bridged circuit to detect strain; and a second resistor group including a first temperature detection resistor arranged at the first strain position and a second temperature detection resistor arranged at the second strain position, and detecting temperature.SELECTED DRAWING: Figure 2 【課題】温度検出または温度補正を正確に行うことができ、かつ、小型化に有利な圧力センサ【解決手段】圧力に応じた変形を生じるメンブレンと、前記メンブレン上において所定の歪特性を生じる第１歪位置に配置される第１抵抗体及び第３抵抗体と、前記第１歪位置とは異なる歪特性を生じる第２歪位置に配置される第２抵抗体および第４抵抗体とを含み、ブリッジ回路を形成して歪を検出する第１抵抗体群と、前記第１歪位置に配置される第１温度検出用抵抗体と、前記第２歪位置に配置される第２温度検出用抵抗体と、を含み温度を検出する第２抵抗体群と、を有する圧力センサ。【選択図】図２