DISPLACEMENT MAGNIFICATION DEVICE WITH VARIABLE AND ZERO THERMAL EXPANSION AND VARIABLE SHAPE SECONDARY MIRROR UNIT INCLUDING THE SAME
To provide a displacement magnification device capable of achieving low thermal expansion even with an actuator member with a high coefficient of thermal expansion and a variable shape secondary mirror unit including the same.SOLUTION: A bottom of a thermal expansion actuator 1' is fixed to a b...
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Main Authors | , , |
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Format | Patent |
Language | English Japanese |
Published |
13.08.2020
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Subjects | |
Online Access | Get full text |
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