DISPLACEMENT MAGNIFICATION DEVICE WITH VARIABLE AND ZERO THERMAL EXPANSION AND VARIABLE SHAPE SECONDARY MIRROR UNIT INCLUDING THE SAME

To provide a displacement magnification device capable of achieving low thermal expansion even with an actuator member with a high coefficient of thermal expansion and a variable shape secondary mirror unit including the same.SOLUTION: A bottom of a thermal expansion actuator 1' is fixed to a b...

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Bibliographic Details
Main Authors ISHIMURA YASUO, SAKAMOTO HIRAKU, KASHIYAMA REO
Format Patent
LanguageEnglish
Japanese
Published 13.08.2020
Subjects
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