CONTROL DEVICE, EXPOSURE APPARATUS, AND ITEM PRODUCTION METHOD

• Main Author: MOTEGI TAKESHI
• Format: Patent
• Language: English; Japanese
• Published: 13.08.2020
• Subjects: APPARATUS SPECIALLY ADAPTED THEREFOR; CINEMATOGRAPHY; CONTROL OR REGULATION OF ELECTRIC MOTORS, ELECTRIC GENERATORSOR DYNAMO-ELECTRIC CONVERTERS; CONTROLLING TRANSFORMERS, REACTORS OR CHOKE COILS; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER; ELECTRICITY; ELECTROGRAPHY; GENERATION; HOLOGRAPHY; MATERIALS THEREFOR; ORIGINALS THEREFOR; PHOTOGRAPHY; PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES; PHYSICS

To provide a control device capable of precisely controlling driving of a driving unit with a simple configuration.SOLUTION: A control device 100 according to the present invention includes a plurality of current supplying sources 20 that each supply a current by using a PWM method, a first detection unit that detects the driving state of a driving unit 14, and a control unit 50 that, when the value of at least one of a plurality of currents Ixf, Ixb, Iyl, Iyr which are necessary to drive the driving unit 14 and which are supplied from the plurality of current supplying sources 20 on the basis of the detection result obtained by the first detection unit is equal to a prescribed value, changes the respective values of the plurality of currents Ixf, Ixb, Iyl, Iyr.SELECTED DRAWING: Figure 4 【課題】簡易な構成で駆動部の駆動を精度良く制御することができる制御装置を提供する。【解決手段】本発明に係る制御装置１００は、各々がＰＷＭ方式を用いて電流を供給する複数の電流供給源２０と、駆動部１４の駆動状態を検出する第１の検出部と、第１の検出部による検出結果に基づいて複数の電流供給源２０によって供給される駆動部１４の駆動に必要な複数の電流Ｉｘｆ、Ｉｘｂ、Ｉｙｌ、Ｉｙｒのうち少なくとも一つの電流の値が所定の値である場合に、複数の電流Ｉｘｆ、Ｉｘｂ、Ｉｙｌ、Ｉｙｒの各々の値を変更する制御部５０と、を備えることを特徴とする。【選択図】 図４