METHOD OF MANUFACTURING GLASS SUBSTRATE

• Main Authors: NISHIKAWA YOSHINORI, YOSHINO KEIICHI
• Format: Patent
• Language: English; Japanese
• Published: 13.08.2020
• Subjects: CHEMISTRY; DEVICES OR ARRANGEMENTS, THE OPTICAL OPERATION OF WHICH ISMODIFIED BY CHANGING THE OPTICAL PROPERTIES OF THE MEDIUM OF THEDEVICES OR ARRANGEMENTS FOR THE CONTROL OF THE INTENSITY,COLOUR, PHASE, POLARISATION OR DIRECTION OF LIGHT, e.g.SWITCHING, GATING, MODULATING OR DEMODULATING; FREQUENCY-CHANGING; GLASS; INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES; MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES; MEASURING; METALLURGY; MINERAL OR SLAG WOOL; NON-LINEAR OPTICS; OPTICAL ANALOGUE/DIGITAL CONVERTERS; OPTICAL LOGIC ELEMENTS; OPTICS; PHYSICS; TECHNIQUES OR PROCEDURES FOR THE OPERATION THEREOF; TESTING

To suppress the average number of acceptable defects of a lot from being increased if the number of acceptable defects of a glass original plate used to manufacture a glass substrate increases in a short time.SOLUTION: A method of manufacturing a glass substrate from a glass original plate comprises: a defect detecting process S11 of detecting an acceptable defect present in the glass original plate and determined based upon a predetermined determination criterion to be acceptable and an unacceptable defect determined based upon the predetermined determination criterion to be unacceptable; and an original plate determining process S12 of determining a defect of the glass original plate based upon a result of the defect detecting process S11. From a plurality of glass original plates determined in the original plate determining process S12 to be nondefective, an average value of the number of acceptable defects per sheet is calculated as a monitor value, and based upon the monitor value, the determination criterion is changed.SELECTED DRAWING: Figure 3 【課題】ガラス基板の製造に使用されるガラス原板の合格欠陥の個数が短期的に増加した場合に、ロットに対する合格欠陥の平均個数の増加を抑制する。【解決手段】ガラス原板からガラス基板を製造する方法は、前記ガラス原板に存在する所定の判定基準で合格と判定される合格欠陥と前記判定基準で不合格と判定される不合格欠陥とを検出する欠陥検出工程Ｓ１１と、欠陥検出工程Ｓ１１の結果に基づき、前記ガラス原板の良否を判定する原板判定工程Ｓ１２とを備える。原板判定工程Ｓ１２で良品と判定された複数の前記ガラス原板について、１枚当りの前記合格欠陥の個数の平均値を監視値として算出し、前記監視値に基づき、前記判定基準を変更する。【選択図】図３