LIGHT IRRADIATION DEVICE, IMAGING DEVICE AND LASER PROCESSING DEVICE
To provide a light irradiation device capable of enhancing resolution of a light beam pattern according to the number of light radiation points, and an imaging device and a laser processing device in which the light irradiation device is incorporated.SOLUTION: A light irradiation device 100 comprise...
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Main Authors | , , , , |
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Format | Patent |
Language | English Japanese |
Published |
27.07.2020
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Subjects | |
Online Access | Get full text |
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Summary: | To provide a light irradiation device capable of enhancing resolution of a light beam pattern according to the number of light radiation points, and an imaging device and a laser processing device in which the light irradiation device is incorporated.SOLUTION: A light irradiation device 100 comprises a plurality of waveguides (light guide parts) 36 for making light pass therethrough and a phase adjustment section 31b for adjusting a phase of light to be emitted from a plurality of emission ports 38 provided at the plurality of waveguides 36. The plurality of emission ports 38 are arrayed at the minimum redundancy interval.SELECTED DRAWING: Figure 1
【課題】光放射点の個数に合わせて光ビームパターンの分解能を高めることができる光照射装置、並びに、これを組み込んだイメージング装置及びレーザー加工装置を提供すること。【解決手段】光照射装置100は、光をそれぞれ通過させる複数の導波路(導光部)36と、複数の導波路36に設けた複数の射出ポート38から射出させる光の位相を調整する位相調整部31bとを備え、複数の射出ポート38は、最小冗長間隔で配列されている。【選択図】図1 |
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Bibliography: | Application Number: JP20190000901 |