NOZZLE AND METHOD FOR PRODUCING NOZZLE
To provide a nozzle and a method for producing the nozzle.SOLUTION: A method for producing the nozzle includes processes of: (a) supplying a first material that can receive multi-photon reaction; (b) forming a first microstructured pattern in the first material by using a multi-photon process; (c) d...
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Main Authors | , , |
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Format | Patent |
Language | English Japanese |
Published |
16.07.2020
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Subjects | |
Online Access | Get full text |
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Summary: | To provide a nozzle and a method for producing the nozzle.SOLUTION: A method for producing the nozzle includes processes of: (a) supplying a first material that can receive multi-photon reaction; (b) forming a first microstructured pattern in the first material by using a multi-photon process; (c) duplicating the first microstructured pattern in a second material to produce a first mold having a second microstructured pattern; (d) duplicating the second microstructured pattern in a third material to produce a second mold having a third microstructured pattern with a plurality of microstructures in the third material; (e) planarizing the third microstructured pattern of the second mold in a layer of a fourth material and in the layer, exposing a top of each of the microstructures constituting the third microstructured pattern; and (f) removing the third material to obtain a nozzle having a plurality of holes in the fourth material, in which the holes correspond to the plurality of microstructures constituting the third microstructured pattern.SELECTED DRAWING: Figure 2
【課題】ノズル及びそのノズルを作製する方法を提供する。【解決手段】(a)多光子反応を受けることが可能な第1の材料を供給する工程、(b)多光子過程を用いて第1の材料内に第1の微細構造化パターンを形成する工程、(c)第2の材料内に第1の微細構造化パターンを複製して、第2の微細構造化パターンを有する第1の型を作製する工程、(d)第3の材料内に第2の微細構造化パターンを複製して、第3の材料内の複数の微細構造を有する第3の微細構造化パターンを有する第2の型を作製する工程、(e)第4の材料の層で第2の型の第3の微細構造化パターンを平坦化する工程で、その層は第3の微細構造化パターンをなす各微細構造の頂部を露出させる工程、(f)第3の材料を除去する工程であって、第4の材料内の複数の穴を有するノズルが得られ、それらの穴は第3の微細構造化パターンをなす複数の微細構造に対応する工程とを含む。【選択図】図2 |
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Bibliography: | Application Number: JP20200009185 |