MASK FOR VAPOR DEPOSITION, AND OLED PANEL USING THE SAME

• Main Authors: PARK JAE SEOK, SON HYO WON
• Format: Patent
• Language: English; Japanese
• Published: 16.07.2020
• Subjects: CHEMICAL SURFACE TREATMENT; CHEMISTRY; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING MATERIAL WITH METALLIC MATERIAL; COATING METALLIC MATERIAL; DIFFUSION TREATMENT OF METALLIC MATERIAL; ELECTRIC HEATING; ELECTRIC LIGHTING NOT OTHERWISE PROVIDED FOR; ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL; METALLURGY; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION

To provide a mask for vapor deposition having an even through hole.SOLUTION: A mask for vapor deposition includes a metallic plate containing an iron-nickel alloy. The metallic plate includes an effective region including plural through holes and bridges between the plural through holes, and a non-effective region arranged on an outer periphery of the effective region. The through hole is formed by a coupling part, at which a first face hole on a first face and a second face hole on a second face of the metallic plate are communicated with each other. A width of the second face hole is larger than a width of the first face hole. The metallic plate is arranged in the non-effective region, and includes a first groove positioned near one end in a longitudinal direction of the metallic plate, and a second groove positioned near the other end. Depths of the first and second grooves are larger than a depth of the first face hole, and smaller than a depth of the second depth. The first and second grooves are formed on the first face. The first and second grooves include a straight line part and a curve part coupled with the straight line part. The straight line part is parallel to a virtual line in a vertical direction for connecting a terminal end of the second face hole. The curve part is formed on an outer side in a horizontal direction than the straight line part.SELECTED DRAWING: Figure 7 【課題】均一な貫通ホールを有する蒸着用マスクを提供する。【解決手段】蒸着用マスクは、鉄-ニッケル合金を含む金属板を含む。金属板は、複数個の貫通ホール及び複数個の貫通ホールの間のブリッジを含む有効領域と、有効領域の外周に配置される非有効領域とを含む。貫通ホールは、金属板の第１面上の第１面孔と、第２面上の第２面孔が連通する連結部によって形成される。第２面孔の幅は、第１面孔の幅より大きい。金属板は、非有効領域に配置され、金属板の長さ方向の一端の近くに位置する第１溝と、他端の近くに位置する第２溝とを含む。第１及び第２溝の深さは、第１面孔の深さよりは大きく、第２面孔の深さよりは小さい。第１及び第２溝は、第１面に形成されている。第１及び第２溝は、直線部及び直線部と連結される曲線部を含む。直線部は、第２面孔の終端をつなぐ垂直方向の仮想の線と平行する。曲線部は、直線部より水平方向の外側に形成される。【選択図】図７