SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

• Main Authors: YAHIRO SHUNICHI, KAJIWARA HIRONOBU, SAKAI MITSUHIRO
• Format: Patent
• Language: English; Japanese
• Published: 09.07.2020
• Subjects: APPARATUS SPECIALLY ADAPTED THEREFOR; BASIC ELECTRIC ELEMENTS; CINEMATOGRAPHY; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; ELECTROGRAPHY; HOLOGRAPHY; MATERIALS THEREFOR; ORIGINALS THEREFOR; PHOTOGRAPHY; PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES; PHYSICS; SEMICONDUCTOR DEVICES

To provide a technique of shortening a total length of a substrate processing apparatus.SOLUTION: A substrate processing apparatus according to an embodiment comprises: a preprocessing line, an application line, a transport line, a development processing line, a first transport part, a second transport part, a third transport part, and a fourth transport part. The application line is arranged in parallel to the preprocessing line. The transport line is arranged above or below the application line. The development processing line is arranged above or below the preprocessing line. The first transport part is provided between the preprocessing line and the application line, and transports a substrate from the preprocessing line to the application line. The second transport part is arranged in series to the first transport part, and transports the substrate to the transport line. The third transport part is arranged in series to the first transport part, and transports the substrate to the development processing line. The fourth transport part is arranged in series to the first transport part, and transports the substrate from the development processing line.SELECTED DRAWING: Figure 1 【課題】基板処理装置の全長を短くする技術を提供する。【解決手段】実施形態に係る基板処理装置は、前処理ラインと、塗布ラインと、搬送ラインと、現像処理ラインと、第１搬送部と、第２搬送部と、第３搬送部と、第４搬送部とを備える。塗布ラインは、前処理ラインに対して並列に配置される。搬送ラインは、塗布ラインの上方、または下方に配置される。現像処理ラインは、前処理ラインの上方、または下方に配置される。第１搬送部は、前処理ラインと塗布ラインとの間に設けられ、前処理ラインから塗布ラインに基板を搬送する。第２搬送部は、第１搬送部に対して直列に配置され、基板を搬送ラインに搬送する。第３搬送部は、第１搬送部に対して直列に配置され、現像処理ラインに基板を搬送する。第４搬送部は、第１搬送部に対して直列に配置され、現像処理ラインから基板を搬送する。【選択図】図１