LIGHT-EMITTING DEVICE

• Main Author: FUJIMORI JIRO
• Format: Patent
• Language: English; Japanese
• Published: 02.07.2020
• Subjects: BASIC ELECTRIC ELEMENTS; ELECTRIC HEATING; ELECTRIC LIGHTING NOT OTHERWISE PROVIDED FOR; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; SEMICONDUCTOR DEVICES

To prevent a coating layer formed by ALD from cracking even when the coating layer is provided above or below an intermediate layer having a linear expansion coefficient different from the coating layer.SOLUTION: A coating layer 240 is a layer formed by atomic layer deposition (ALD) and includes an insulating inorganic material. An intermediate layer 220 includes a material having a coefficient of linear expansion different from that of the material of the coating layer 240. A buffer layer 230 has a surface in contact with the intermediate layer 220, that is, a first surface. The buffer layer 230 has a surface in contact with the coating layer 240, that is, a second surface. A difference in linear expansion coefficient between the material of the buffer layer 230 and the inorganic material of the coating layer 240 is smaller than a difference in linear expansion coefficient between the material of the intermediate layer 220 and the inorganic material of the coating layer 240.SELECTED DRAWING: Figure 5 【課題】ＡＬＤによって形成された被覆層をこの被覆層と異なる線膨張係数を有する中間層の上又は下に設けても、被覆層が割れることを防止する。【解決手段】被覆層２４０は、ＡＬＤ（Ａｔｏｍｉｃ Ｌａｙｅｒ Ｄｅｐｏｓｉｔｉｏｎ）によって形成された層であり、絶縁性の無機材料を含んでいる。中間層２２０は、被覆層２４０の材料と異なる線膨張係数を有する材料を含んでいる。バッファ層２３０は、中間層２２０と接する面、すなわち第１面を有している。バッファ層２３０は、被覆層２４０と接する面、すなわち第２面を有している。バッファ層２３０の材料と被覆層２４０の無機材料の線膨張係数の差は、中間層２２０の材料と被覆層２４０の無機材料の線膨張係数の差より小さくなっている。【選択図】図５