CONFOCAL SENSOR

• Main Authors: MORINO HISAYASU, TAKASHIMA JUN
• Format: Patent
• Language: English; Japanese
• Published: 02.07.2020
• Subjects: MEASURING; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS; MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS; PHYSICS; TESTING

To provide a confocal sensor which has a wider measurement range.SOLUTION: A confocal sensor 1 comprises: a light source 10 which emits multi-wavelength light; a diffraction lens 130 which causes the light to have chromatic aberrations along the optical axis and converges the light on an object 200 not through other lenses; a pinhole 120 which passes reflected light of the light, the reflected light being focused on the object 200 and converged by the diffraction lens 130; and a measurement unit 40 which measures the distance from the diffraction lens 130 to the object 200 based upon a wavelength of the reflected light, the distance L2 from the pinhole 120 to the diffraction lens 130 being variable.SELECTED DRAWING: Figure 1 【課題】測定範囲がより広い共焦点センサを提供する。【解決手段】共焦点センサ１は、複数の波長の光を出射する光源１０と、光に対して光軸方向に沿って色収差を生じさせ、他のレンズを介さずに光を対象物２００に集光する回折レンズ１３０と、光のうち、対象物２００において合焦して反射し、回折レンズ１３０で集光された反射光を通過させるピンホール１２０と、反射光の波長に基づいて、回折レンズ１３０から対象物２００までの距離を測定する測定部４０と、を備え、ピンホール１２０から回折レンズ１３０までの距離Ｌ２は可変である。【選択図】図１