DEVICE AND IMPRINT DEVICE

• Main Authors: UENO TAKEHIKO, AIHARA SENTARO
• Format: Patent
• Language: English; Japanese
• Published: 18.06.2020
• Subjects: AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING; BASIC ELECTRIC ELEMENTS; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; PERFORMING OPERATIONS; SEMICONDUCTOR DEVICES; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDEDFOR; SHAPING OR JOINING OF PLASTICS; TRANSPORTING; WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL

To provide an imprint device advantageous for determining quality of imprint processing.SOLUTION: The device for curing an uncured material in a state where a member and the uncured material on a substrate are in contact with each other, includes: an imaging unit for acquiring an image of at least one of the member and the substrate while the member and the uncured material are in contact with each other; a dispenser for supplying droplets of the uncured material onto the substrate; and a determination unit for determining whether the uncured material is dispensed from a plurality of dispensing ports provided in the dispenser based on an image acquired by the imaging unit in a state where the member deformed into a convex shape on a side of the substrate and the uncured material supplied on the substrate are in contact with each other.SELECTED DRAWING: Figure 1 【課題】インプリント処理の良否を判定するのに有利なインプリント装置を提供する。【解決手段】部材と基板上の未硬化の材料とが互いに接触した状態で前記未硬化の材料を硬化させる装置であって、前記部材と前記未硬化の材料とが互いに接触している間に、前記部材及び前記基板の少なくとも一方の画像を取得する撮像部と、前記基板上に前記未硬化の材料の液滴を供給するディスペンサと、前記基板の側に凸形状に変形させた前記部材と前記基板上に供給された前記未硬化の材料とを互いに接触させた状態で前記撮像部によって取得された画像に基づいて、前記ディスペンサに設けられた複数の吐出口から前記未硬化の材料が吐出されているか否かを判定する判定部と、を有することを特徴とする装置を提供する。【選択図】図１