OPTICAL MICROSCOPE AND OBSERVATION METHOD

• Main Authors: MURAYAMA MASANORI, OIDE TAKAHIRO
• Format: Patent
• Language: English; Japanese
• Published: 18.06.2020
• Subjects: INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES; MEASURING; OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS; OPTICS; PHYSICS; TESTING

To provide an optical microscope capable of observations with a wide vision and a high NA.SOLUTION: The optical microscope according to an embodiment includes: a light source 11; a servo-type scanning mirror 17 deflecting an irradiation light; an objective lens 20 refracting an observation light generated by a nonlinear optical phenomenon of a sample 21; relay lenses LX1, LX2 which an observation light separated by a dichroic mirror DCM2 enters; and a light detector PMT1 detecting observation lights from the relay lenses LX1, LX2. In the center of the objective lens 20, the servo-type scanning mirror 17 scans an irradiation light so that the irradiation light is projected into a center region 41, and the observation light passing through the center region 41 and the surrounding region 42 of the objective lens 20 is detected by the light detector PMT1 via the relay lenses LX1, LX2.SELECTED DRAWING: Figure 1 【課題】広視野、かつ、高ＮＡで観察可能な光学顕微鏡を提供する。【解決手段】本発明の一態様にかかる光学顕微鏡は、光源１１と、照射光を偏向するサーボ型走査ミラー１７と、試料２１での非線形光学現象によって生じた観察光を屈折する対物レンズ２０と、ダイクロイックミラーＤＣＭ２によって分離された観察光が入射するリレーレンズＬＸ１、ＬＸ２と、リレーレンズＬＸ１、ＬＸ２からの観察光を検出する光検出器ＰＭＴ１と、を備え、対物レンズ２０の中央部には、サーボ型走査ミラー１７は、照射光が中央領域４１内に投影されるよう、照射光を走査し、対物レンズ２０の中央領域４１と周辺領域４２とを通過した観察光がリレーレンズＬＸ１、ＬＸ２を介して光検出器ＰＭＴ１で検出される。【選択図】図１