OPERATION MONITORING DEVICE AND METHOD

• Main Authors: OGAWA MORIMASA, KOYAMA HIDEAKI
• Format: Patent
• Language: English; Japanese
• Published: 11.06.2020
• Subjects: CONTROL OR REGULATING SYSTEMS IN GENERAL; CONTROLLING; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS ORELEMENTS; PHYSICS; REGULATING

To accurately and early detect a sign of anomaly of a batch process.SOLUTION: Based on time-series data of a quantity of processing, obtained in the past, a processing quantity estimation unit 15C estimates, for each future monitoring-timing included in a future interval of fixed length, a future estimation-value of a quantity of processing at the future monitor-timing. For each future monitoring-timing, an anomaly sign detecting unit 15E compares a future estimation-value of a quantity of processing at the future monitoring-timing with a target value of a target value track and, based on an obtained comparison result, detects a sign of an anomaly that may occur during the future interval.SELECTED DRAWING: Figure 1 【課題】バッチプロセスの異常予兆を正確かつ早期に検知する。【解決手段】プロセス量予測部１５Ｃが、過去に得られたプロセス量の時系列データに基づいて、一定長の未来区間に含まれる未来の監視タイミングごとに、当該未来の監視タイミングにおけるプロセス量の未来予測値を予測し、異常予兆検知部１５Ｅが、未来の監視タイミングごとに、当該未来の監視タイミングにおけるプロセス量の未来予測値と目標値軌道の目標値とを比較し、得られた比較結果に基づいて未来区間に発生しうる異常の予兆を検知する。【選択図】 図１